Description
Z direction ?500 ?m
X direction 50 mm
Evaluation length 0.1 to 50 mm
Straightness accuracy 0.3 ?m/50 mm
Detector vertical movement volume 50 mm
Measurment speed 0.15, 0.3, 0.6, 1.5, 3 / 0.05, 0.1, 0.2, 0.5, 1 mm/s (switching)
Calculation Standards Comply with ISO 4287-1997/2009, ISO 13565, ASME B46.1-2002/2009, JIS2013/2001, JIS1994, JIS1982, CNOMO and further standards
Parameter Profile Curve Pa, Pq, Pp, Pv, Pc, PSm, P?q, PPc, Psk, Pku, Pt, Pmr(c), Pmr, P?c, Rz82, TILTA, AVH, Hmax, Hmin, AREA, Rmax, Rz, Sm, ?a, ?q, ?a, ?q, Lr, Rsk, Rku,
Rk, Rpk, Rvk, Mr1, Mr2, Vo, K, tp, tp2, Hp
Roughness Curve Ra, Rq, Rz, Rv, Rc, Rt, RSm, R?q, Rsk, Rku, Rmr(c), Rmr, R?c, Rz94, R3z, R?a, R?a, R?q, Ry, Lr, Sm, S, tp, tp2, PC, RPc, JIS, RPc ISO, RPc EN, Pc, PPI,
Rp, Rmax, Rz.I, RS, Rmr2, Mr1, Mr2, Rpk, Rvk, Rk, Vo, K, A1, A2, Rpm, ?a, ?q, Htp
Motif R, Rx, AR, W, Wx, AW, Rke, Rpke, Rvke, NCRX, NR, CPM, SR, SAR, Wte, NW, SAW, SW, Mr1e, Mr2e, Vo, K
Evaluation Curve Profile Curve, Roughness Curve, ISO13565 Special Roughness
Curve, Roughness motif curve, Waviness motif curve, Upper envelope waviness curve
Characteristics graph Abbot curve, Amplitude density function, Power graph
Filter types; Gaussian, 2RC (phase compensation), 2RC (non-phase compensation)
Cutoff value ?c: 0.08, 0.25, 0.8, 2.5 mm
?s None, 2.5, 8, 25 ?m
